SEM, TEM CDSEM, Defect Review SEM and e-beam lithography.
Non exhaustive list. please contact for specific requirements
WJA Electron part number |
Part description |
KLA-Tencor 8XXX / eCD |
|
WJA-MET-F-R |
Rebuild for KT/FEI emitter (0.4-0.55um radius) |
WJA-KT-15-P/Asy |
2 SEM insp. apertures in original equipment Titanium holder for 8100XP/8250 |
WJA-KT-15-B/SC |
1 SEM inspected 15micron aperture close tolerance (All K-T 8XXX CDSEM) |
WJA-KT-15-B-Asy |
2 premium apertures in original equipment Titanium holder for 8100XP/8250 |
WJA-KT-15-B |
15 micron gold foil premium quality |
WJA-SD-KT-8100 |
scintillator for 8100/8250 |
WJA-KT-15-P/Asy |
BDA aperture (used in electron source) |
WJA-KT-8X-EF |
Energy filter repair (8100XP and later) |
|
|
JEOL JWS Defect review / TFE Lab SEM |
|
WJA-MET-A |
Schottky emitter repair |
WJA-SD-J-2 |
Scintiullator Jeol JWS |
WJA-A-300-P |
300µm BDA |
WJA-JE-M-40-PT |
40µm platinum Aperture |
|
|
AMAT SEMVision / VeritySEM |
|
WJA-MET-AMAT-D-R |
Rebuild Services for Denka TFE Source Package w/integrated Extractor, 0.4 - 0.6 uM |
WJA-MET-AMAT-D-R/CORE |
Refundable Core Charge for MET-AMAT-D-R |
Focused Ion Beam
FIB and Dual Beam FIB with speciality on FEI models. Install, decommission, service & repair available as well as consumables. Gas handling (GIS) service & Ion source installation also available.
Please contact WJA Electron for latest parts availabiltiy |
|
|