Services
SEM, TEM CDSEM, Defect Review SEM and e-beam lithography.
Installation, decommission, service & repair, of a variety of equipment manufactured by (but not limited to) Jeol, FEI/Philips, Hitachi, KLA-Tencor.
In some cases equipment upgrades, for reliability or
specialist requirements, are available as stand alone
upgrade or as a refurbishment package.
Examples:
Vacuum system upgrade to KLA-Tencor 8XXX & eCD series CDSEMs, including electron source bypass valve to enable fast, on site, electron source emitter change. Benefits include: lower cost of ownership, higher vacuum reliability and ease of maintenance.
Digitization of analogue SEM. Old analogue SEMs frequently have excellent electron optics but suffer, compared to more modern equipment on the market, in respect to image aquisition and scan control. Digitizing your scan and image aquisition can provide a cost effect means to bring an old SEM into the modern era. Benefits include: ease of image aquisition, improved visual imaging (enabling faster alignments), more accurate scan calibration, reduced time to publish images.